Role of neutral transport in aspect ratio dependent plasma etching of three-dimensional features
نویسندگان
چکیده
of three-dimensional features Chad M. Huard Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave., Ann Arbor, Michigan 48109-2122 Yiting Zhang, Saravanapriyan Sriraman, and Alex Paterson Lam Research Corp., 4650 Cushing Parkway, Fremont, California 94538 Mark J. Kushner Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave., Ann Arbor, Michigan 48109-2122
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تاریخ انتشار 2017